• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Electrostatic accelerometer comprising an electrically conducting test weight freely floating in a cage and a system of electrodes located in said cage at the points where the axes of a coordinate tri-rectangular trihedral meet the cage. The electrodes are associated by pairs located along a given coordinate axis and form with the test weight pairs of variable capacitors. Two capacitor bridges including the variable capacitors give the sum and difference of the capacities of these variable capacitors and adder subtractor means gives the individual values of these capacities. The accelerometer further comprises means for calculating the gradients of the measured capacities of a pair of electrodes, means for squaring the positioning control signals relating to said pair of electrodes, and means for multiplying said gradient by said squared signals.
    公开号:SU1308206A3
    申请号:SU813359480
    申请日:1981-11-27
    公开日:1987-04-30
    发明作者:Бернар Алэн
    申请人:Оффис Насьональ Д,Этюд Э Де Решерш Аэроспасьаль О.Н.Е.Р.А. (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to accelerometers in which the acceleration measurement is made on the basis of the effort required to keep the inertial element at rest or feed back to the position defined relative to the device body, in particular to accelerometers where these forces are produced electrostatically, and is aimed at improving them with points of view of their accuracy
    The purpose of the invention is to improve the measurement accuracy.
    FIGURE shows a block diagram of the accelerometer J H4 of FIG. 2 to determine the position of the inertial element; in fig. Zi 4 - blocks of compensation of the variable component of the inertial element potential; FIG. 5 shows a unit for compensating the constant coagulation potential of the inertial element; in fig (, 6 - computational scheme S
    In FIG. 1, the inertial element 1 and accelerometer electrodes are designated. The inertial element is made spherical (in the form of mapaj and floats in the body (not shown; Three pairs of pole electrodes) located in the body together with the measuring element (ball) create a sequence of capacitors (capacitors). Each electrode plays the role of both a positioning electrode and Position Control Electrodes Figure 1 shows both electrodes 2 and 3 in the same pair.
    Electrodes 2 and 3. are connected with position determination circuit 4. This circuit
    R
    capacities () between the inertial element and the electrodes 2 and 3, as well as the value of (C + C) - C (, where the capacitive value is known.
    The difference signal (C, -Cr.) Is fed to circuit 5 to generate position control signals. Position control signals produced by circuit 5f are fed to electrodes 2 and 3. These signals can be either constant or variable.
    The value (C, + C ,,) - C, is transmitted to computational circuit 6, which outputs the measured acceleration value to the display unit 7.
    Electrode 3 in the accelerometer electrode system is connected to circuit 8 to compensate for variable composition
    the inertial element potential. The output of the circuit 8 is connected to the electrodes 9 and 10.
    If the position control signal is variable, then a second circuit 1 is necessary to compensate for the variable component of the potential of the inertial element, and this circuit is identical to circuit 8, but operates on a different frequency. Its input is connected to the electrode 12, and the outputs to the electrodes 13 and 14. The vibrating electrode 15 in the electrode system of the accelerometer forms part of the compensation circuit 16 of the inertial element potential. The input of the circuit 16 is connected to the electrodes 2 and 3 of the position detection and control. l position, and the outputs with the same electrodes,
    Fig. 2 shows a measurement circuit 4 of a positioning signal, comprising an inertial element (ball) 1 and electrodes 2 and 3, creating capacitances C, and C with ball 1, as well as a part of the housing that is not equipped with electrodes, creating capacitance CQ with a ball, which is much larger than C and C.
    The electrodes 2 and 3 are connected by means of capacitors 17 and 18 to the terminals of the secondary winding of the differential transformer 19, To the primary
    The winding of the differential transformer is supplied from the alternating voltage source 20 with an angular frequency CO. The middle point 21 of the secondary winding of the differential transformer 19 is connected to one of the secondary winding terminals of the second differential transformer 22. Another secondary winding terminal of the differential transformer 22 is grounded through a capacitor 23 of known capacitance C,, The primary winding of the differential transformer 22 is connected to an AC source 24 with an angular frequency about .
    The midpoint 25 of the differential transformer 22 is connected to the input of the operational amplifier 26 with a feedback capacitance C. The output of this operational amplifier is connected to two synchronous detectors 27 and 28, to which signals are received with the ANGULAR frequencies O and co from the respective sources 20 and 2D of alternating voltage.
    The signals produced by the output p of the synchronous detector 27, proportional to () t, are fed to the position control signal generation circuit 5, Circuit 5 mainly contains correction element 29 and differential amplifier 30. When the position control signals are variable with the frequency CO, the circuit contains a modulator 31, of which this height is a carrier. The output of the position control signal 5 is connected to the electrodes 2 and 3 via resistors 32 and 33.
    The signal arising at the output p, proportional to the value of (C, + C) -C, when the potential V / (o / of the ball at the frequency is zero, is fed to the computational circuit 6.
    To eliminate any errors in the measurement of the acceleration introduced by the parasitic capacitances Cpi, Cp, Cp between the electrodes and conductors at the ground potential, and position control are surrounded by protective electrodes 34 and 35, the latter are connected to the screen 36, which also covers alternating sources voltage and transformers and is connected to the midpoint 25 of the secondary winding of the transformer 22 and to one input of the operational amplifier 26.
    If e is the amplitude at the secondary terminals of the differential transformers 19 and 22, then the input signals to the position measurement circuit 4 can be written as:
    p with -C, e; (one)
    S.Ge;
    , р (С, + С) - - (С, - С.). V (with).
    (2) (3)
    where V (Q) -5l4-- -e.
    Co 2: C, 1.
    V / co / relates to the amplitude of the component of the inertial element potential at frequency co.
    Equality (2) for p contains the parasitic value V ((j), therefore measures should be taken to exclude 5. 5
     , 20
    , 35
    40
    45
    25
    50
    "
    a constant potential V and a potential V / coV at an angular frequency to the inertial element. If, moreover, the position control signals are variable with the OE frequency, then the potential of the inertial element at that frequency should also be excluded.
    The purpose of schemes 8, 11 and (b is to eliminate these potentials by reducing to zero,
    FIG. Figures 3 and 4 show the variable component compensation circuits of the inertial element at frequencies ω (fig. 3) and (0; (figure 4),
    The alternating potential of the inertia element is amplified in the operational amplifier, respectively 37 or 38, and detected in the synchronous detector 39 or 40. The detected signal is fed to the integrators 41 or 42, and from there to the modulator 43 or 44. From the output of the modulator 43 or 44, the signal simultaneously on symmetric electrodes - 9 and 10 or 13 and 14.
    A synchronous detector 39 and modulator 43 are supplied to the signal at a frequency from the source 24 of alternating voltage. A synchronous detector 40 and modulator 44 receive a reference signal with a frequency CO, which is the frequency of the position control signal, from the modulator 31 (FIG. 2),
    Due to the independence of the frequencies co and CO; both operations of zeroing should be carried out by separate circuits, which are shown in Figs 3 and 4, one of which operates at the frequency Ca, and the other at the frequency of it ;.
    FIG. 5 shows a circuit compensating the constant component of the potential of the inertial element.
    Reducing the constant value of the weakly varying component of the inertial element to zero is similar to that shown in FIG. 3 and 4, except that the measurement of this constant value cannot be carried out using a fixed electrode. A vibro-electrode should be used.
    Vibration electrode 15 consists of a piezoelectric (ceramic) element, which is connected to the source 45 with an angular frequency Q. This electrode modulates capacitance C ,,
    and therefore the potential V, given by the equation, which takes the form:
    VQ t;
    AV V
    uCt
    GO + Z: C;

    The potential t, Vg is applied to electrodes 2 and 3 | amplified by operational amplifier 46 and detected by a synchronous child, otor of 47. The detected signal is fed to the integrator 48, and from there to the amplifier 49. The output signal from the latter is fed to
    V, V,, relative to other pairs of electrodes are squared in construction blocks 54 and 55 and others (not shown), and the squares thus obtained are multiplied by VC, up to v C in multipliers from 56 to 61 so that to get values oTVCj (V) to VCg (V,).
    20
    25
    blowing add:
    vc, / v, / +
    VC, / Vj / + ,, /; VCy / Vj / + VCfe / V, / S
    a, the signals emanating from these adders are components of the electrostatic force F, f, c, and f, respectively,
    Formula Invention. eni
    Detection electrodes 2 and 3 are polar 15 Totalizers 62-64 carry out tracking and position monitoring, Since there are three pairs of position determination and control electrodes in a three-dimensional accelerometer, one of these pairs is also spun down to eliminate the constant potential of the inertial element.
    Fig. 6 shows the computational scheme 6. The following signals are received at this scheme: signals for determining the position of pn (Fig. 2); signals for controlling the position of V ,, V (Fig. 2), going to electrodes 2 and 3, as well as other signals for determining the position and monitoring of the position, coming from the electrodes and directed to the pairs of electrodes relative to other coordinate axes.
    The cross-section of the electrode is assumed to be very small, so that the electrode-ball capacitors can be comparable with flat capacitors with the capacitance given by the equation
    (X
    thirty
    one
    (6)
    35
    40
    An electrostatic accelerometer containing a housing with an inertial ball-shaped element located in it, an electrode system located in accordance with the coordinate axes and forming an electrostatic suspension, a ball positioning circuit containing the first capacitive bridge capacitors of which are connected to the secondary winding of the first differential transformer, the primary winding of which is connected to an alternating voltage source, an operational amplifier with a capacitance in the feedback circuit, the output of which is Inonu with one of the inputs. a synchronous detector, the second input of which is connected to an alternating voltage source, and the input is connected to one of the electrodes, a ball position control circuit containing a correction element, the input of which is connected to the output of the synchronous detector, and the output to series-connected differential amplifier and modulator, and display unit.
    Where
    g is dielectric constant; (S is the surface area, X is the height of the capacitor.
    After differentiating equation (6) with respect to X, the following equation is obtained:
    9 Ci s; Tx EG
    (7)
    An electrostatic accelerometer containing a casing with an inertial ball-shaped element located in it, an electrode system located in accordance with the coordinate axes and forming an electrostatic suspension, a circuit for determining the position of the ball containing the first capacitive bridge capacitors of which are connected to the secondary winding of the first differential transformer, the primary winding of which is connected to a source of alternating voltage, an operational amplifier with frequency in the feedback circuit, the output of which is Inonu with one of the inputs. a synchronous detector, the second input of which is connected to a source of alternating voltage, and the input is connected to one of the electrodes, a ball position control circuit containing a correction element, whose input is connected to the output of the synchronous detector, and the output is connected to a successively connected differential amplifier both modulator and display unit
    Block 50 allows to calculate the difference (C, -Cj), while block 51 calculates the sum (C, + 0). The totalizer-vyatt, kp1 with the fact that, reader 5-2 gives out signals, it represents measurement accuracy, a second capacitive bridge, a second differential transformer, one of the secondary terminals
    These signals are squared in the construction block 53. Signals received in this way
    proportional to VC,, VC and equivalent values of VC, VC, C and VCg relative to other electrode pairs.
    V, and V values
     7
    and also equi-Vj and V,
    V, V,, relative to other pairs of electrodes are squared in construction blocks 54 and 55 and others (not shown), and the squares thus obtained are multiplied by VC, up to v C in multipliers from 56 to 61 so that to get values oTVCj (V) to VCg (V,).
    Adders 62-64 are performed after
    blowing add:
    vc, / v, / +
    VC, / Vj / + ,, /; VCy / Vj / + VCfe / V, / S
    a, the signals emanating from these adders are components of the electrostatic force F, f, c, and f, respectively,
    Adders 62-64 are performed with the formula Invention. eni
    thirty
    35
    40
    An electrostatic accelerometer containing a housing with an inertial ball-shaped element located in it, an electrode system located in accordance with the coordinate axes and forming an electrostatic suspension, a ball positioning circuit containing the first capacitive bridge capacitors of which are connected to the secondary winding of the first differential transformer, the primary winding of which is connected to an alternating voltage source, an operational amplifier with a capacitance in the feedback circuit, the output of which is Inonu with one of the inputs. a synchronous detector, the second input of which is connected to an alternating voltage source, and the input is connected to one of the electrodes, a ball position control circuit containing a correction element, the input of which is connected to the output of the synchronous detector, and the output to series-connected differential amplifier and modulator, and display unit
    50
    .att, kr1s the fact that
    .att, kr1s the fact that
    in order to improve the measurement accuracy, a second capacitive bridge was inserted into it, a second differential transformer, one of the secondary terminals of which is grounded through an injected capacitor, and the other secondary terminal connected to the secondary point of the secondary windings of the second transformer, a second AC source connected to the primary winding of the second differential transformer, the middle point of the secondary winding of which is connected to the input of the operational amplifier and one of the protective the input of the operational amplifier is connected to another protective electrode, as well as the second synchronous detector, one of the inputs of which is connected to the second source of alternating voltage, and the other input to the output of the operational amplifier and one of the inputs of the first synchronous detector, as well as computational circuit connected to the display unit and including the subtraction and addition blocks, the inputs of which are connected to the output of the ball positioning circuit, the adder-subtractor, whose inputs are connected to the outputs of the block subtracting and adding, gradient calculation unit, the input of the Voporo is connected to the output of the subtractor, quadrants, the inputs of which are connected to the corresponding electrodes multipliers, the inputs of which are connected to the outputs of the gradient calculation unit and the outputs of the quadrators, summators, the inputs of which are connected to the outputs of the multipliers and the outputs - with the inputs of the display unit, and
    There are also two blocks of a variable component of the potential of the inertial element, each of which contains an operational amplifier with a capacitance in the feedback circuit, the input of which is connected to the corresponding symmetric electrodes, and the output is connected to the input of the synchronous detector, the integrator whose input is connected with the output of the synchronous detector, the second input of which is connected to the corresponding source of alternating voltage, and the output to the computational circuit, and a modulator, one
    the input of which is connected to the integrator output, the other input to the output of the second alternating voltage source of the position determination circuit, and the output connected to the corresponding
    a pair of electrodes, as well as a constant component compensation unit of the potential of the inertial element, containing a power source, the input of which is connected to the corresponding electrodes, a synchronous detector, one of the inputs of which is connected to the output of the power supply and the other to the output of the operational amplifier, the input of which is connected to the appropriate
    electrodes, an integrator whose input is connected to the output of a synchronous detector, and an output to an amplifier input whose output is connected to the corresponding electrodes, while the output of the synchronous detector is connected to the input of the computational circuit.
    With
    five

    t: h
    ,
    -V2
    Ria.Z
    us. 4e,
    Editor M.Petrova
    Compiled by N.Marahovska Tehred V.Kadar
    Order 1646/59 Circulation 777. Subscription
    VNIIPI USSR State Committee
    for inventions and discoveries 113035, Moscow, Zh-35, Raugaska nab, d.4 / 5
    Production and printing company, Uzhgorod, Projecto st., 4
    FIG. five
    Proofreader A.Zi Yukos
    权利要求:
    Claims (1)
    [1]
    Formula, invented. shenia
    An electrostatic accelerometer containing a casing with an inertial element in the form of a ball located in it, an electrode system located in accordance with the coordinate axes and forming an electrostatic suspension, a ball position determination circuit containing a first capacitive bridge, the capacitors of which are connected to the secondary winding of the first differential transformer, the primary winding of which is connected to a source of alternating nagda E - dielectric constant;
    <3 - surface area,
    X is the variable height of the capacitor.
    After differentiating equation (6) with respect to X, the following equation is obtained:
    E c i_ = s;
    ““ Ah “Fuck ~“ *
    Block 50 allows you to calculate the difference (C ( -C g ), while block 51 calculates the sum (C 4 + C 2 ). Subtractor 5-2 produces signals representing C ( and C 2 , These signals are squared in the erection block 53. The thus obtained voltage signals, an operational amplifier with a capacitance in the feedback circuit, the output of which is connected to one of the inputs 2 of the synchronous detector, the second input of which is connected to an AC voltage source, and the input is connected to one of the electrodes, circuit control the position of the ball containing the correction element One of which is connected to the output of the synchronous detector, and the output is connected to the differential amplifier and modulator in series, and an indication unit, characterized in that, in order to increase the measurement accuracy, a second capacitive bridge, a second differential transformer, one of the secondary terminals are introduced into it about-
    类似技术:
    公开号 | 公开日 | 专利标题
    SU1308206A3|1987-04-30|Electrostatic accelerometer
    US4583404A|1986-04-22|Electrostatic accelerometer
    US4009607A|1977-03-01|Force measuring system including combined electrostatic sensing and torquing means
    US5440939A|1995-08-15|Servo-controlled pendular micro-sensor
    EP0385917B1|1993-11-18|Pulse-driven accelerometer arrangement
    US4642555A|1987-02-10|Differential capacitance detector
    US4336718A|1982-06-29|Control circuit for accelerometer
    KR100379622B1|2003-04-08|Static capacitance-to-voltage converter and converting method
    JPH05256870A|1993-10-08|Small-sized silicon accelerometer and its method
    KR20010039758A|2001-05-15|Sensor Signal Processing Apparatus
    CN106872730B|2019-07-02|A kind of acceleration measurement device and method
    WO2010024729A2|2010-03-04|Micromechanical gyroscope and method for tuning thereof based on using of amplitude modulated quadrature
    JP2003531359A|2003-10-21|Vibrating micro gyroscope
    JP2717011B2|1998-02-18|Circuit device for temperature compensation of capacitive and differential pressure sensors
    EP0969287A2|2000-01-05|Charge balance network with floating ground capacitive sensing
    US3295379A|1967-01-03|Spherically symmetric gyro
    RU2568147C1|2015-11-10|Gyro accelerometer with rotor electrostatic suspension and complete primary info
    US4799386A|1989-01-24|Electrostatic accelerometer with dual electrical connection to its test mass
    US3680392A|1972-08-01|Three-axis accelerometer
    JP2019060794A|2019-04-18|Physical quantity measurement device, electronic apparatus and moving body
    Dzhandzhgava et al.2010|Strapdown inertial navigation system based on a hemispherical resonance gyro
    EP0118359B1|1987-05-20|Electrostatic accelerometer
    RU2471149C2|2012-12-27|Compensation-type micromechanical gyroscope
    RU2750131C1|2021-06-22|Capacitive motion sensor
    SU1109677A1|1984-08-23|Method of measuring electric field strength
    同族专利:
    公开号 | 公开日
    JPS57146166A|1982-09-09|
    GB2088564B|1985-06-12|
    DE3147011A1|1982-07-01|
    DE3147011C2|1986-02-06|
    US4393710A|1983-07-19|
    FR2495328A1|1982-06-04|
    GB2088564A|1982-06-09|
    FR2495328B1|1986-04-11|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US6679118B1|1999-04-27|2004-01-20|Tokimec Inc.|Accelerometer and spherical sensor type measuring instrument|
    RU2618482C1|2013-05-02|2017-05-03|Нортроп Грумман Литеф Гмбх|Acceleration sensor and manufacturing method of acceleration sensor|FR1409016A|1963-08-27|1965-08-20|Sperry Rand Corp|Inertial accelerometer|
    FR1462195A|1965-03-30|1966-04-15|Onera |Micro-accelerometer|
    FR2124055B1|1971-02-02|1975-03-21|Onera |DE3205367C1|1982-02-17|1985-11-07|Office National d'Etudes et de Recherches Aérospatiales, O.N.E.R.A., Châtillon-sous-Bagneux, Hauts-de-Seine|Electrostatic accelerometer having a cruciform test mass|
    EP0118359B1|1983-02-28|1987-05-20|Office National d'Etudes et de Recherches Aérospatiales |Electrostatic accelerometer|
    FR2541775B1|1983-02-28|1985-10-04|Onera |ELECTROSTATIC SUSPENSION ACCELEROMETERS|
    FR2544865B1|1983-04-21|1985-10-04|Onera |ELECTROSTATIC SUSPENSION ACCELEROMETERS|
    US4611863A|1983-07-25|1986-09-16|Honeywell Inc.|Magnetically supported and torqued momentum reaction sphere|
    FR2566599B1|1984-06-25|1986-09-26|Onera |ELECTROSTATIC SUSPENSION DEVICE OF A BODY|
    US4711125A|1985-11-06|1987-12-08|Morrison Melvin M|Inertial measurement unit|
    FR2592491B1|1985-12-31|1988-02-12|Onera |ELECTROSTATIC TRIAXIAL ACCELEROMETER WITH DOUBLE ELECTRICAL CONNECTION TO THE TEST MASS|
    US4818948A|1986-08-05|1989-04-04|Pratt & Whitney Canada Inc.|Capacitive bridge-type probe for measuring blade tip clearance|
    FR2608771B1|1986-12-18|1989-04-28|Onera |ULTRASENSITIVE ACCELEROMETER CALIBRATION DEVICE|
    US4795965A|1987-10-14|1989-01-03|Pratt & Whitney Canada Inc.|Capacitance to voltage conversion circuit including a capacitive bridge and a capacitive offset|
    JP2802954B2|1989-12-28|1998-09-24|株式会社ワコー|Test method for a sensor having a force acting body and a sensor capable of implementing the method|
    US6864677B1|1993-12-15|2005-03-08|Kazuhiro Okada|Method of testing a sensor|
    WO1991010118A1|1989-12-28|1991-07-11|Wacoh Corporation|Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus|
    US5253526A|1990-05-30|1993-10-19|Copal Company Limited|Capacitive acceleration sensor with free diaphragm|
    US5357803A|1992-04-08|1994-10-25|Rochester Institute Of Technology|Micromachined microaccelerometer for measuring acceleration along three axes|
    US5562266A|1992-10-29|1996-10-08|Aerospatiale Societe Nationale Industrielle|Rate gyro calibration method and apparatus for a three-axis stabilized satellite|
    AU735871B2|1997-06-11|2001-07-19|Fugro Finance Ag|Gravity gradiometer|
    US5922951A|1997-06-11|1999-07-13|The Broken Hill Proprietary Company Ltd.|Gravity gradiometer|
    US5962782A|1997-06-11|1999-10-05|The Broken Hill Proprietary Company Limited|Gravity gradiometer accelerometers|
    FI20041344A|2004-10-15|2006-04-16|Valtion Teknillinen|Sensor and method for measuring a quantity applied to a component|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    FR8025272A|FR2495328B1|1980-11-28|1980-11-28|IMPROVEMENTS ON ELECTROSTATIC ACCELEROMETERS|
    [返回顶部]